Horizontal furnace chemical vapor deposition (CVD / C to precipitate HGO)

appointment

 
Oven chemical vapor deposition (deposition of carbon) is designed for isothermal treatment CVD / CVI carbon materials on the surface of the substrate or by hydrocarbon gas (e.g., C3H8, etc.) As a carbon source.

Technical characteristics of the vacuum laboratory furnaces

 
1. The size of the working zone of the furnace can reach 2.5 m × 2.5 m × 5 m, it allows the CVD processing of large parts.
2. Uses multiple separate temperature control zones, with good temperature uniformity.
3. There is a special deposition chamber with high integrity and protection against contamination.
4. Use multiple deposition gas channels without dead zones, with good effect precipitation.
5. The furnace chemical vapor deposition has the function of removing the tar, ash, dust, particles and organic gases released during the deposition process.

Personal accessories

 
1. The oven doors: Hinged door / frame on wheels, manual locking / automatic ring seal.
2. The body of the furnace: all carbon steel / stainless steel interior / full stainless steel
3. The chamber vacuum furnaces laboratory: Soft carbon felt / graphite felt soft / hard composite felt / the CFC
4. A heater muffle: HIP-pressed graphite / graphite extruded high purity, high strength and high density / small sized graphite
5.Pnevmaticheskaya system: volumetric flow meter / mass flow meter, manual / automatic valve, imported / Chinese brand
6. The vacuum pump and vacuum: Imported / Chinese brand
7. HMI: analog screen / touch screen / industrial computer
8. PLC: OMRON / SIEMENS
9. The controller of the furnace temperature chemical vapor deposition: SHIMADEN / EUROTHERM
10.Termopara: C type / S type / K type / N Type
11.Registrator: paperless / paper; imported / Chinese brand
12.Elektricheskie elements: CHINT / SCHNEIDER / SIEMENS
13.Telezhka: roller loader / forklift / foldable

The models and parameters of vacuum furnaces for laboratories

 

options Models	HCVD -060609-C	HCVD -080812-C	HCVD -101015-C	HCVD -121225-C	HCVD -151530-C	HCVD -252035-C	HCVD -252550-C
The size of the working area W × H × D (mm)	600 × 600 × 900	800 × 800 × 1200	1000 × 1000 × 1500	1200 × 2500 × 200	1500 × 1500 × 3000	2500 × 2000 × 3500	2500 × 2500 × 5000
Load (kg)	300	800	1500	2500	5000	10000	20000
Max. Temperature (℃)	1500	1500	1500	1500	1500	1500	1500
Temperature uniformity (℃)	± 7.5	± 7.5	± 7.5	± 10	± 10	± 15	± 15
Heating power (kW)	210	360	480	600	900	1200	1600
Ultimate vacuum (Pa)	20	20	20	20	20	20	20
The rate of increase of pressure (Pa / h)	0.67	0.67	0.67	0.67	0.67	0.67	0.67
These characteristics may vary according to the technological requirements of the customer, they are not the standards for the reception, detailed specifications will be confirmed in the technical proposal or contract.