Vertical furnace chemical vapor deposition (CVD / HGO for the deposition of SiC)

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Vertical tube furnace is a furnace CVD chemical vapor deposition (deposition carborundum) intended for the emergence of corrosion-resistant coatings on the surface of carbon materials, or improve their properties trihlormonosilanom substrate method (MTS) as a gas source.

Technical features of vertical furnaces for CVD

 
1.C control using the most advanced technology, it is possible to precisely control the flow and pressure trihlormonosilana (MTS), the deposition flux is stable and the pressure varies in a narrow range.
2.Imeet special deposition chamber with high integrity and protection against contamination.
3. Use multiple deposition gas channels without dead zones, with good effect precipitation.
4. The vertical tube furnace has a function of removing CVD corrosive flue gases, combustible and explosive gases, dust and solid sticky materials of low melting during the deposition process.
5.With noveyschey using corrosion-resistant design of vacuum pumps, increasing their survivability and reducing maintenance time.

Personal accessories

 
1. The oven doors: spiral lift / hydraulic lift / manual lifting, manual locking / automatic gate ring
2. The body of the furnace: all carbon steel / stainless steel interior / full stainless steel
3. Camera vertical furnace for cardiovascular disease: mild carbon felt / graphite felt soft / hard composite felt / the CFC
4. A heater muffle: HIP-pressed graphite / graphite extruded high purity, high strength and high density / small sized graphite
5.Pnevmaticheskaya system: volumetric flow meter / mass flow meter, manual / automatic valve, imported / Chinese brand
6. The vacuum pump and vacuum: Imported / Chinese brand
7. PLC: OMRON / SIEMENS
8. The temperature controller is a vertical tube furnace CVD: SHIMADEN / EUROTHERM
9. Thermocouple: C type / S type / K type / N Type
10.Registrator: paperless / paper; imported / Chinese brand
11. HMI (interface): analog screen / touch screen / industrial computer
12. Electrical components: CHINT / SCHNEIDER / SIEMENS

The models and parameters of vertical furnaces for CVD

 

options Models	VCVD-0305-SIC	VCVD-0508- SIC	VCVD-0812- SIC	VCVD-1015- SIC	VCVD-1218- SIC	VCVD-1520- SIC
working area size D × H (mm)	Φ300 × 500	Φ500 × 800	Φ800 × 1200	Φ1000 × 1500	Φ1200 × 1800	Φ1500 × 2000
Load (kg)	50	150	500	1000	2000	3000
Max. Temperature (℃)	1500	1500	1500	1500	1500	1500
Temperature uniformity (℃)	± 5	± 5	± 7.5	± 7.5	± 10	± 10
Heating power (kW)	45	90	180	300	420	540
Ultimate vacuum (Pa)	20	20	20	20	20	20
The rate of increase of pressure (Pa / h)	0.67	0.67	0.67	0.67	0.67	0.67
The aforementioned data are subject to change according to the technological requirements of the customer, they are not the standards for the reception, detailed specifications will be confirmed in the technical proposal or contract.