Vertical kiln chemical vapor deposition (CVD / C to precipitate HGO)

appointment

 
Oven chemical vapor deposition (deposition of carbon) is designed for isothermal treatment CVD / CVI carbon materials on the surface of the substrate or hydrocarbon gas (e.g., C3H8, etc.) As a carbon source.

Technical features of vertical vacuum tube furnaces

 
1.Konstruktsiya furnace with different numbers of heating zones, with a good temperature uniformity.
2.Imeetsya special deposition chamber with high integrity and protection against contamination.
3. Use multiple deposition gas channels without dead zones, with good effect precipitation.
4.Imeetsya function tar removal, ash, dust, particles and organics released during the deposition process.

Options parts furnace chemical vapor deposition

 
1.Dveri furnace: spiral lift / hydraulic lift / manual lifting, manual locking / automatic ring seal.
2.Korpus furnace: full carbon steel / stainless steel interior / full stainless steel
3.Kamera vertical vacuum tube furnaces: Soft carbon felt / graphite felt soft / hard composite felt / the CFC
4.Nagrevatel, muffle: HIP-pressed graphite / graphite extruded high purity, high strength and high density / small sized graphite
5.Pnevmaticheskaya system: volumetric flow meter / mass flow meter, manual / automatic valve, imported / Chinese brand
6.Vakuumny pump and vacuum: // Imported Chinese brand
7.HMI (interface): analog screen / touch screen / industrial computer
8.PLC: OMRON / SIEMENS
9.Kontroller temperature chemical vapor deposition furnace: SHIMADEN / EUROTHERM
10.Termopara: C type / S type / K type / N Type
11.Registrator: paperless / paper, imported / Chinese brand
12.Elektricheskie elements: CHINT / SCHNEIDER / SIEMENS

The models and parameters of vertical vacuum tube furnaces

 

options Models	VCVD-0305-C	VCVD-0508-C	VCVD-0812-C	VCVD-1015-C	VCVD-1218-C	VCVD-1520-C
working area size D × H (mm)	Φ300 × 500	Φ500 × 800	Φ800 × 1200	Φ1000 × 1500	Φ1200 × 1800	Φ1500 × 2000
Load (kg)	50	150	500	1000	2000	3000
Max. Temperature (℃)	1500	1500	1500	1500	1500	1500
temperature uniformity	± 5	± 5	± 7.5	± 7.5	± 10	± 10
(KW) Heating capacity	45	90	180	300	420	540
(Pa) Ultimate vacuum	20	20	20	20	20	20
(Pa / h) Speed ​​of pressure increase	0.67	0.67	0.67	0.67	0.67	0.67
The above specifications are subject to change according to the technological requirements of the customer, they are not the standards for the reception, detailed specifications will be confirmed in the technical proposal or contract.