Horizontal furnace chemical vapor deposition (CVD / HGO for the deposition of SiC)

appointment

 
Horizontal furnace chemical vapor deposition (deposition carborundum) intended for the emergence korrozieustoychivyeh coatings on the surface of carbon materials, or improve their properties trihlormonosilanom substrate (MTS) as a gas source.

Technical features of the horizontal furnace for cardiovascular disease

 
1. With the use of the most advanced control technology. You can precisely control the flow and pressure of the MTS. Feed deposition pressure is stable and varies within a narrow range.
2.Imeetsya special deposition chamber with high integrity and protection against contamination.
3. Use multiple deposition gas channels without dead zones, with good effect precipitation.
4. The horizontal chemical vapor deposition furnace has a function of removing corrosive flue gases, combustible and explosive gases, dust and solid sticky materials of low melting during the deposition process.
5.With using the latest design of corrosion resistant vacuum pumps, increasing their survivability and reducing maintenance time.

The configuration of the horizontal furnace for cardiovascular disease

 
1. The oven doors: Hinged door / frame on wheels, manual locking / automatic ring seal.
2. The body of the furnace: all carbon steel / stainless steel interior / full stainless steel
3. The oven chamber: Soft carbon felt / graphite felt soft / hard composite felt / the CFC
4. A heater muffle: HIP-pressed graphite / graphite extruded high purity, high strength and high density / small sized graphite
5.Pnevmaticheskaya system: volumetric flow meter / mass flow meter, manual / automatic valve, imported / Chinese brand
6. The vacuum pump and vacuum: Imported / Chinese brand
7. PLC: OMRON / SIEMENS
8. Controller horizontal furnace chemical vapor deposition temperature: SHIMADEN / EUROTHERM
9. Thermocouple: C type / S type / K type / N Type
10.Registrator: paperless / paper; import / Chinese brand
11.HMI (interface): analog screen / touch screen / industrial computer
12.Elektricheskie elements: CHINT / SCHNEIDER / SIEMENS
13.Telezhka: roller loader / forklift / foldable

Models and horizontal furnace parameters for CVD

 

options Models	HCVD -060609-C	HCVD -080812-C	HCVD -101015-C	HCVD -121225-C	HCVD -151530-C	HCVD -252035-C	HCVD -252550-C
The size of the working area W × H × D (mm)	600 × 600 × 900	800 × 800 × 1200	1000 × 1000 × 1500	1200 × 2500 × 200	1500 × 1500 × 3000	2500 × 2000 × 3500	2500 × 2500 × 5000
Load (kg)	300	800	1500	2500	5000	10000	20000
Max. Temperature (℃)	1500	1500	1500	1500	1500	1500	1500
Temperature uniformity (℃)	± 7.5	± 7.5	± 7.5	± 10	± 10	± 15	± 15
Heating power (kW)	210	360	480	600	900	1200	1800
Ultimate vacuum (Pa)	20	20	20	20	20	20	20
The rate of increase of pressure (Pa / h)	0.67	0.67	0.67	0.67	0.67	0.67	0.67
The above specifications are subject to change according to the technological requirements of the customer, they are not the standards for the reception, detailed specifications will be confirmed in the technical proposal or contract.